000 00261nam a22001097a 4500
020 _a9780367148553
082 _a621
_bNAK/V
100 _aNaik,Pramod k
245 _aVacuum science,technology and applications
260 _aNewyork
_bCRC press
_c2018
942 _cBK
999 _c20070
_d20070